Tiny, revolutionary point-of-use pump from Alcatel cuts costs, saves energy

Alcatel of France has launched a revolutionary new dry pump range, the IPUP A100, designed for integration within semi-conductor tools and delivering substantial cost, time and energy savings to users.

The revolutionary dry pump for 300mm semiconductor fab now launched by Alcatel is around 25 percent smaller and uses less than 50 percent of the power than conventional dry pumps with similar pumping speeds. The new 100m3/h point-of-use dry pump, called the IPUP A100, is fully compatible with clean room operation and can replace remote pumps up to 500m3/h, said Alcatel Vacuum Technology Dry Pump Product Manager Bertrand Seigeot.
 
'The radical new design of the IPAP U100 helps cut our customers costs, saves energy and increases up-time, said M. Seigeot. 'The pumps small size promotes temperature uniformity and eliminates by-product deposition, while the energy savings are created by locating the pump close to the process, eliminating conductance losses. Power consumption is also reduced thanks to the availability of variable speeds in standby mode.
 
The integration of the pump in the tool allows significant benefits for the end-user.
'Eliminating vacuum lines creates costs savings, while reducing energy consumption and footprint; plus, the elimination of by-product condensation in foreline pipings increases both up-time and yield, M. Seigeot added.'Time savings are another distinct advantage; because there is no longer any need for tool-to-tool or fab-to-fab variation at installation and you get reduced evacuation time for load-locks.
 
The IPUP A100s low vibration and noise levels, and compliance with high safety standards make it ideally suitable for clean room use. Two main versions are available: the IPUP A100L, for clean applications not requiring purge gas, and the IPUP A100P for all process applications requiring comprehensive monitoring and precise temperature regulation up to 130°C. Dedicated versions for ion implanters are also available.
 
The new IPUP A100 range was developed jointly with Applied Materials [we suggest adding description and location of Applied Material here].  Among the innovations in the IPUP A100s creation are:
 

*   Energy savings realized by locating the pump close to the process; variable speed capability in stand-by mode, and lower average rotational speeds.
*   Better temperature uniformity and the elimination of by-product deposition.
*   Faster installation and start-up time.
*   Very low vibration and noise levels
*   Reduced footprint.

Background

 
Alcatel Vacuum Technology is a member of the Alcatel Telecom Group and employs 900 people throughout the world.  Alcatels vacuum technology has applications in areas such as instrumentation, glass coating for thermal insulation and infrared barriers; light bulb and television tube manufacture; CD/DVD production; medicine and pharmaceuticals; semi-conductors, and industrial helium leak detection in areas such as airbag design and air-conditioning. Based in Annecy, France, Alcatel Vacuum Technology is a global company exporting 90 percent of its products to markets around the world.
 
For more information, please contact:
 
Bertrand Seigeot, Dry Pump Product Manager
Telephone: +33 50 65 78 75
Fax: +33 50 65 76 44
Email: Bertrand.seigeot@an.cit.alcatel.fr
Website: www.alcatelvacuum.com