Berkeley Achieves New Proof of Performance at Tier One Semiconductor Tool OEM

Autocalibration® Technology Automates Teaching of Wafer-Handling Robot to a Human Hair Width

RICHMOND, Calif., November 13, 2003 -- Berkeley Process Control, Inc. (Berkeley) announced today that the company's patented Autocalibration technology--widely recognized as a rapid, automated alternative to time consuming robot "teaching"--had been demonstrated to achieve calibration repeatability of a human hair width over hundreds of calibrations. Thought to be at minimum ten times better than achieved by traditional teaching techniques, touch Autocalibration repeatability was proven as part of a Tier 1 semiconductor tool OEM's evaluation of a popular wafer-handling robot controlled by Berkeley's BX2 general-purpose machine controller.

"For some time, Berkeley's Autocalibration technology has been recognized as providing a large reduction in tool down time versus traditional robot teaching," said Berkeley Director of Engineering David Taylor. "What used to take hours, takes minutes. Now, we've demonstrated Autocalibration technology's extraordinary repeatability--less than 50 microns (0.050 mm) standard deviation for each axis of motion in a recent critical evaluation."

Berkeleys unrivalled Autocalibration technology improves semiconductor fab equipment productivity by automating critical robot calibration processes conventionally performed by technicians using time-consuming and subjective manual methods. Calibration that previously required hours takes just minutes--reducing costly production down time. Eliminating teaching subjectivity and improving calibration repeatability enhances wafer-handling reliability to further reduce tool productivity loss.

About Berkeley Process Control: Berkeley Process Control, Inc., Richmond California, a privately held company founded in 1981, is a leading provider of innovative automation solutions and flexible automation products. Berkeley solutions have enhanced productivity in applications that include semiconductor fabrication, optical fiber manufacturing, automated welding, aircraft manufacturing, packaging and converting, and general automation. Berkeley capabilities include multi-disciplinary engineering expertise to deliver motion, process and turnkey machine solutions, as well as the design of flexible machine-and-motion control products. To learn more about Berkeley, visit its website at www.berkeleyprocess.com.

Company Contact:
Lenson Wong, Director of Marketing
Berkeley Process Control, Inc.
(510) 222-8004
lensonw@berkeleyprocess.com

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