Ultra-Low Flow Mass Flow Controller for the Semiconductor Manufacturing Industry.

Tucson based Alicat Scientific has recently announced its intention to begin working in the semiconductor space by introducing its line of ultra-low flow (0.5SCCM -- 50SCCM) Alicat Mass Flow Controllers to the semiconductor manufacturing space.

Tucson, AZ (PRWEB) August 10, 2004 -- Some semiconductor manufacturing processes such as chemical vapor deposition (CVD), physical vapor deposition (PVD), thin film, sputtering, and backside wafer cooling call for a MFC that has the ability to control below 5SCCM. With patented Laminar Flow technology Alicat controllers are able to control at flow rates as low as 0.5SCCM full scale. Alicat MFCs also have a control range of 1% -- 100% of full scale with a response control time of 100ms and an accuracy of 1%.

Alicat devices are NIST and CE certified and all come with standard 14 gas user selectable calibration and a small footprint for easy mounting. Alicat MFCs also come standard with a dynamic display allowing the user to quickly view the status of the device and several parameters including mass flow, volumetric flow, psia, and temperature. A variety of customizable components are available from the factory including totalizer function and a variety of fittings.

Alicat Scientific is a Tucson, AZ based manufacturer of mass flow instrumentation based on a patented technology of laminar flow. Alicat has been making mass flow instrumentation since 1992. Alicat currently has over 22,000 mass flow control products in use worldwide.

Contact information
Shailesh Patel
Director,Business Development
1.520.290.6060
http://www.alicatscientific.com
Alicat Scientific
2045 N. Forbes Ave.
Tucson,AZ 85745

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