E M Optomechanical Announces First Installation of 3D MEMS Profiler at Auburn University

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Recently, E M Optomechanical, Inc., also known as EMOM, installed its first OPTOProTM 3D MEMS Optical Profiler at Auburn University for use in testing and characterizing micro-electro-mechanical systems devices.

E M Optomechanical, Inc., (EMOM), recently delivered its first 3D MEMS Optical Profiler to Auburn University. Known as the OPTOProTM Model 622A, the Profiler is based on a patented technology, called long-working distance interference microscopy. This first generation product is intended primarily for use by microsystems researchers for making real-time dynamic measurements of the micro- and nano-scale motions of micro-electro-mechanical systems (MEMS) devices and other microsystems.

This product was developed because there were no commercial optical profilers tailored specifically to the needs of microsystems researchers. Its key feature is that it allows a long working distance without any sacrifice in measurement resolution. This allows capabilities not possible with other techniques such as allowing space for probes that are needed to attach to microsystem devices and viewing through portholes into vacuum chambers.

The profiler instrument is controlled by EMOM’s MEMScriptTM Software that also acquires and analyzes the data collected. This software has several unique features, such as the ability to control microsystem devices, which by nature have moving parts, and making real time measurements of performance.

Dr. W. Robert Ashurst, Assistant Professor of Chemical Engineering at Auburn University’s Samuel Ginn College of Engineering, whose research interests include MEMS systems design, fabrication and reliability, says that having the OPTOProTM will …”allow me to cut a year off my research project schedule by providing me the measurement data that I need.”

About E M Optomechanical, Inc.

E M Optomechanical, Inc. spun-off from Optomec, Inc. in 1998 to provide optomechanical engineering, design and fabrication services to the Photonics industry. The Company has recently completed its transition to a product oriented Company committed to commercialization of the long-working distance interference microscope technology.


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Thomas Swann
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