March Plasma Systems Announces FlexTRAK-WR Plasma System for High-volume Semiconductor Wafer Processing

Share Article

MarchÂ?s new FlexTRAK-WR plasma system provides the capability to address many of the emerging wafer level packaging and cleaning applications. The fully automated tool can process wafers from 150 to 300mm at high production rates. At a fraction of the typical investment and floor space requirement, the FlexTRAK-WR system is the cost effective gas plasma solution for converging industries.

Based on the successful FlexTRAK™ platform, March Plasma Systems announces the release of FlexTRAK-WR for high-volume plasma processing of semiconductor wafers. FlexTRAK-WR is a high-throughput system designed to process semiconductor wafers up to 300 mm, loaded into multiple cassettes or Front Opening Universal Pods (FOUP).

"There is a rapidly growing market for advanced plasma processing of semiconductor wafers after final passivation but before traditional back-end processes," said Peter Bierhuis, President of March. "We are leveraging our market leadership and applications expertise in back-end plasma processing to this new space. FlexTRAK-WR brings our production-proven advanced plasma technology to high-volume semiconductor wafer processing with an attractive value proposition."

FlexTRAK-WR is capable of direct, downstream or ion-free (patent-pending) plasma processing for a wide range of semiconductor applications. FlexTRAK-WR three-axis symmetrical chamber and proprietary process control provides unmatched process uniformity while minimizing cycle times.

March's proprietary software offers an intuitive graphical user interface with easy touch-screen programming. FlexTRAK-WR is both Internet- and LAN-ready, and real-time process representation allows statistical data gathering. FlexTRAK-WR easily integrates with other process equipment and is SMEMA compatible.

March Plasma Systems is the global leader in plasma processing technology for the PCB, semiconductor, and microelectronics industries. March has operations and support centers worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, March designs and manufactures a complete line of award winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the design of plasma processes that improve both product reliability and increase production yields. See the March web site for more details:

FlexTRAK™ and FlexTRAK-WR are trademarks of March Plasma Systems.

For further information contact:

March Plasma Systems (International Headquarters)

Scott D. Szymanski

March Plasma Systems, Inc.

2470-A Bates Avenue

Concord, CA USA 94520-1122

TEL: 925- 246-1666


# # #

Share article on social media or email:

View article via:

Pdf Print

Contact Author

Stephen Sowinski