Heidelberg Instruments, GmbH, Receives Order for DWL66 Maskless Lithography System from Durham University

Share Article

Heidelberg Instruments, GmbH, Heidelberg, Germany, announced the purchase of a DWL66 maskless lithography system by Durham University Center for Electronics.

Heidelberg Instruments, GmbH, Heidelberg, Germany, announced the purchase of a DWL66 maskless lithography system by Durham University Center for Electronics. The DWL66 is a unique, maskless lithography system for mask making and direct writing. This system is capable of producing patterns down to 0.6 microns, and is equipped with the capability of thick resist and grey scale exposure, in addition to metrology, front to backside and layer to layer alignment.

"DWL66 systems continue to be a leading platform in direct write laser lithography applications among the research institutions. We welcome Durham University to the community of over 80 research institutions who currently use this system and look forward to a long standing cooperation," Alexander Forozan, Vice President of World Wide Sales and Marketing, Heidelberg Instruments, GmbH.

"The mask writer will be installed in Durham's School of Engineering and its primary role will be in the manufacture of high quality holographic optical masks for the Center for Electronics group. This application concerns holographic lithography and the need to create amplitude and phase structures on the micron scale. Colleagues working in our molecular and nanoscale electronics group will also find this tool useful for creating standard lithography masks and MEMS structures," adds Dr. Richard McWilliam, Durham University.

About Durham University: Founded in 1832, Durham is a world-class university located in the City of Durham and has a current role of around 11,000 Undergraduates and 3,500 Postgraduates. Durham provides a seat of high quality learning and leading research. In the last Research Assessment Exercise (RAE), 85% of research staff was rated at 5 or 5* (internationally excellent). The School of Engineering at Durham teaches general engineering at undergraduate level and has around 40 academic staff and 50 postgraduates. There are three research centers currently active in the area of microelectronics: the Center for Electronic Systems, the Center for Molecular and Nanoscale Electronics and the Center for Communications. The department also accommodates the Center for Electronic-Nano Systems (CENS), which is a regional organization that actively engages with local industry through collaborative research and design projects. Facilities at the School include a state of the art class 100 clean room, microwave communications test suite and optical laboratory.

About Heidelberg Instruments, GmbH: With an installation base in over 20 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems capable of exposing substrates up to 2.4 meter by 1.9 meter. These systems are used for direct writing and photomask production, in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other exciting applications.

Heidelberg Instruments, GmbH

Alexander Forozan

VP, World Wide Sales and Marketing

Phone: +49 6221 3430 73

http://www.himt.de

# # #

Share article on social media or email:

View article via:

Pdf Print

Contact Author

Alexander Forozan
Visit website