March Plasma Systems Announces Improved AP-1000 Plasma System for Advanced Plasma Processing

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March Plasma Systems announced today the release of an improved version of its highly successful AP-1000 plasma system for high-volume plasma processing of semiconductor and microelectronics devices.

March Plasma Systems announced the release of an improved version of its highly successful AP-1000 plasma system for high-volume plasma processing of semiconductor and microelectronics devices. The current AP-1000 system already enjoys a large installed base at customer sites worldwide, with over 200 systems currently in the field. The redesigned version provides the same production-proven plasma technology and performance in a smaller, more compact and easier-to-service design.

“Every square inch of clean room and manufacturing space is valuable,” said Peter Bierhuis, President of March. “We have improved the new AP-1000 system to consume 24% less actual floor space than before, and 45% less effective floor space when you include all of the required maintenance areas. We have also moved key components to make them more accessible and easier to service. An added benefit for large-scale manufacturing facilities is that more AP-1000 systems can be placed side-by-side in a smaller area because now the chassis is smaller, there are no required maintenance areas at the sides of the system, and the plasma chamber door has been redesigned.“

As before, the AP-1000 system is capable of a variety of plasma modes and can handle a wide range of plasma gasses. The AP-1000 remains the best-in-class choice for batch-type semiconductor and microelectronics applications. March specifically designed the new AP-1000 system with existing customers in mind so that process re-qualification is not required when switching to the improved system. Accordingly, new

AP-1000 system process performance is guaranteed for customers with copy-exact requirements.

For more information about the new and improved AP-1000 system, visit March’s web site at http://www.marchplasma.com, or contact March Plasma Systems directly.

About March Plasma Systems:

March Plasma Systems is the global leader in plasma processing technology for the semiconductor, PCB, and microelectronics industries. March has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, March designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. See the March Plasma Systems web site for more details: http://www.marchplasma.com.

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Scott Szymanski