Heidelberg Instruments to Support Micro and Nano Research at the Institute of Material Research and Engineering (IMRE), Singapore

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Heidelberg Instruments announced the sale of an advanced DWL66 fs maskless laser lithography system to the Institute of Material Research and Engineering(IMRE), a research institute of Singapore’s Agency for Science, Technology and Research(A*STAR). The system will be operated by the SERC Nanofabrication & Characterisation Cluster (SNFC), which lends characterization support and expertise to all research institutes under A*STAR, Singapore universities and industries.

Heidelberg Instruments announced the sale of an advanced DWL66 fs maskless laser lithography system to the Institute of Material Research and Engineering(IMRE), a research institute of Singapore’s Agency for Science, Technology and Research(A*STAR). The system will be operated by the SERC Nanofabrication & Characterisation Cluster (SNFC), which lends characterization support and expertise to all research institutes under A*STAR, Singapore universities and industries.

The DWL66 fs maskless lithography system is capable of binary and grey scale exposure, layer to layer alignment, and is able to produce minimum features down to 0.6 microns.

"We look forward to working with SNFC at IMRE – an organization working on cutting edge research in fields of science and nanotechnology, including optoelectronics, nanomaterials, chemicals, and polymers. Our DWL66 fs system, equipped with an Argon Ion laser, will assist IMRE and A*STAR in fabricating photomasks, support certain projects related to direct lithography application (binary and grey level exposures on various types of resists, including SU8) and nanotechnology research," states Alexander Forozan, Vice President of Sales and Marketing at Heidelberg Instruments.

About Heidelberg Instruments, GmbH: With an installation base of more than 250 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

About the Institute of Materials Research and Engineering (IMRE): The Institute of Materials Research and Engineering (IMRE) is a member of the Agency for Science, Technology and Research (A*STAR). Established in 1996, its mission is to create materials knowledge, develop human capital and to transform technology through innovative research. IMRE undertakes research in selected fields of materials science and engineering, including optoelectronics, nanomaterials, chemicals and polymers. The research institute's innovations and discoveries are constantly being explored to further the applications of advanced materials and processes. For more information, please visit: http://www.imre.a-star.edu.sg

Heidelberg Instruments, GmbH

Britta Abler

http://www.himt.de

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Alexander Forozan
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