Heidelberg Instruments to Support Micro and Nano Research at the Motorola Nanofabrication Research Laboratory, Florida International University

Heidelberg Instruments announced the sale of a µPG101 table top maskless laser patterning system, its latest product, to the Motorola Nanofabrication Research Laboratory at Florida International University, Miami, Florida.

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Heidelberg, Germany (PRWEB) July 5, 2006

Heidelberg Instruments announced the sale of a µPG101 table top maskless laser patterning system, its latest product, to the Motorola Nanofabrication Research Laboratory at Florida International University, Miami, Florida.

The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing features down to 5 microns, with an address grid of 100nm.

The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system. Applications include MEMS, BioMEMS, Integrated Optics, Micro Fluidics, µTAS, or similar areas requiring microstructures

“The Motorola Nanofabrication Research Laboratory at Florida International University in Miami is proud to announce it has selected Heidelberg Instruments’ µPG101 maskless laser patterning system as its choice for an enabling technology which when coupled with the center’s high resolution, direct-write e-beam, and focused ion beam systems, will help bring its existing nanoscale patterning capability to the forefront in the race for rapid prototyping of devices in the range of 25nm and beyond. In August 2006, the MNRL will become the first nanofabrication lab world-wide to facilitate Heidelberg Instruments’ µPG101. The time-saving UV exposure tool brings the ability to download microcircuit patterning directly from CAD file to the substrate, thereby eliminating the need for the conventional mask-making step and allowing inexpensive and rapid iterations during the prototyping phase of device fabrication and design. The µPG101 will also be used by the MNRL to fabricate conventional masks on-site without the need for outside contracting. FIU will initially use the µPG101, to pattern electrodes used for coupling carbon nanotube-based devices fabricated on-site in the labs of their newly constructed, multi-million dollar nano technology center housed in the Advanced Materials Research and Engineering Institute [AMERI]. AMERI is an open-access research and analytical facility serving academic and commercial partners throughout the US and Latin America,” states Dr. Kinzy Jones, Director of AMERI at FIU.

About the Florida International University College of Engineering: FIU is one of the 20 largest universities in the U.S. and is ranked as a Research University in the High Research Activity of the Carnegie Foundation’s prestigious classification system. The College of Engineering and Computing at FIU offers more than 30 degrees through its baccalaureate, master and doctoral programs. Over the last five years, the College has been awarded nearly $50 million in external research funding from a variety of government and corporate sources.

About Heidelberg Instruments, GmbH:

With an installation base of more than 250 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Florida International University

Dr. Kinzy Jones

Director of AMERI

Heidelberg Instruments, GmbH

Alexander Forozan

Vice President of Sales and Marketing

Phone: +49 6221 3430 73

http://www.himt.de

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