Transfer Engineering Provides NREL with a Unique Sample Transfer Station for Integration to an AFM Tool -- Transfer Stations for XPS and SEM Tools with "Sample Flip" Capability to Follow

Share Article

Transfer Engineering and Manufacturing (TEAM) shipped the first of three UHV transfer stations to the National Renewable Energy Lab (NREL). This system contains a cassette for handling and positioning six unique sample platens that can be delivered one at a time to either a HV compatible portable POD or to a loadlock residing within a glove box for removal to an AFM system. The portable POD was manufactured by TEAM and shipped to NREL in 2006.

Transfer Engineering and Manufacturing (TEAM) shipped the first of three UHV transfer stations to the National Renewable Energy Lab (NREL). This system contains a cassette for handling and positioning six unique sample platens that can be delivered one at a time to either a HV compatible portable POD or to a loadlock residing within a glove box for removal to an AFM system. The portable POD was manufactured by TEAM and shipped to NREL in 2006.

The AFM Sample Transfer Station avoids contamination by allowing the transfer of samples to an AFM without exposing them to air. The samples will be picked up from deposition or analytical systems, operating under vacuum, using the portable POD. Maintaining vacuum, the POD is moved and the samples transferred in vacuum to the AFM sample transfer station, which will then be flooded with a special gas (i.e. Argon), and finally to a glove box, which will be filled with the same gas. The samples will be moved manually to the AFM, which is installed in the glove box, where they will be analyzed. These systems have NRELs standardized interface for acceptance of the portable POD and safety interlocking for the vacuum system of the transfer station and interstitial region between the transfer station and POD. The transfers occur at a facility standardized level of 1100 mm off the floor.

Two similar systems with an additional "sample flip" capability are scheduled for delivery -- one to be integrated with an XPS tool and another with a SEM tool. This flipping capability allows the surface of the sample to be created or analyzed face up or face down.

Transfer Engineering and Manufacturing (TEAM), Fremont, California provides innovative products for OEM, Production Facility and R&D/University Lab customers in the Surface Science, Semiconductor, Media, Sputter Deposition and R&D markets. TEAMs core expertise is in the handling, transporting, positioning and manipulation of samples, semiconductor wafers, reticles, substrates, flat panels and other materials with precision and reliability in UHV, HV, and other challenging controlled environments. The product line includes MESC compatible wafer transport systems.

Contact: Judy Ackeret, (510) 651-3000, e-mail jackeret(at)transferengineering.com.

Note to editors: A photograph of the AFM Sample Transfer Station is enclosed.

###

Share article on social media or email:

View article via:

Pdf Print

Contact Author

Visit website