Benchmark Technologies and Estion Sign Distribution Agreement for In-situ Electric Field Test Reticle

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Benchmark Technologies Inc. and Estion, Gmbh. today announced a distribution agreement whereby Estion's test reticle for in-situ observation of potentially damaging electric fields will be sold exclusively worldwide by Benchmark Technologies.

Benchmark Technologies Inc. and Estion, Gmbh. today announced a distribution agreement whereby Estion's test reticle for in-situ observation of potentially damaging electric fields will be sold exclusively worldwide by Benchmark Technologies. The reticle will be manufactured by Estion at its Darmstadt, Germany location. The test system, known as "E-Reticle™" consists of; an electric field recording apparatus housed within a standard 6 inch quartz reticle form factor, a docking station for battery charging and download of collected data, and an analysis software package.

Patrick Reynolds, President of Benchmark Technologies, said, "Electric field-related damage to reticles, either being produced in mask shops or used in wafer fabs, is an ongoing concern in light of the cost of high-end reticles used at the advanced technology nodes. The E-Reticle™ will allow users to identify areas within their fabs where reticles may be subjected to electric fields at thresholds that might cause large defects from electro-static discharge (ESD) or more subtle deterioration in critical dimensions due to electric field induced migration of chrome (EFM). Unlike previous methods for checking electric fields - the E-Reticle™ form factor allows it to be handled in the exact same manner as a conventional reticle enabling observation under the conditions to which production reticles are subjected."

Thomas Sebald, General Manager at Estion added, "We are happy to have a partner like Benchmark to help bring our technology to the semiconductor industry. Their knowledge of the market place coupled with their extensive test reticle product portfolio make them the ideal partner for the E-reticle™ distribution."

About Benchmark Technologies, Inc:
Headquartered in Lynnfield, Massachusetts, Benchmark Technologies is a leading supplier of test reticles, imprint templates, custom fabrication and related services to the global semiconductor and other nanofabrication industries. Additional information about the Company can be found at http://www.benchmarktech.com
About Estion Gmbh:

Estion, located in Darmstadt Germany, is a leading consulting and training firm focused on identifying and minimizing electric field related issues in critical manufacturing and research environments.

For more information contact
Andrew Zanzal
Benchmark Technologies, Inc.
Tel: (781) 246-3303

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ANDREW ZANZAL
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