Integrated System Technology LLC Launched New Fluoropolymer Technology to Prolong Usage of Seals and Consumables in Semiconductor, Solar and LED Industry

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Innovative polymer material and parts supplier makes ‘green’seals

IST, a manufacturer of specialty seals and gaskets for semiconductor production equipment and related industries, announced today their successful introduction of the XL-Soft Technology to enhance the lifetime of o-ring seals and expensive process parts.

IST is the manufacturer of special polymer materials for seals and gaskets and developed very soft materials to seal semiconductor processing equipment in various applications in particular for etch and other plasma processes. These high performance polymers performed exceptionally well in various processing equipment, which already had wear marks and scratches on their sealing surfaces. Instead of refurbishing process chambers, these special seals can be used, saving equipment downtime and high refurbishment costs.

“The XL-Soft Technology was developed on request of a semiconductor device manufacturer. We applied our special knowledge of plasma resistant fluoropolymers on this application and after four months of development and tests we have installed the first seals into production equipment,” said Michael Cho, CEO of IST. “It was a challenging task, but we quickly came up with a very good solution and saved the customer time and money.”

The XL-Soft Technology has 2 key features:
The soft, high performance fluoropolymer material fills up micro cracks and scratches on seal surfaces.
An optimized, larger seal thickness affects a high compression on the scratched surface and seals tightly.

“We are applying this technology on all equipment exhaust lines”, said Michael Cho, “and the semiconductor fabs can run the seals significantly longer and reuse seals, valves and pipes more often.”

For more information about Integrated System Technology go to

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Michael Cho
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