2-Axis Precision Linear Translation Stage for Surface Metrology from PI miCos

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PI miCos releases a new 2-axis precision linear translation stage. The new MCS XY precision linear stage was designed for industrial precision motion control and surface metrology applications and combines robustness and high accuracy.

2-Axis Precision Linear Translation Stage for Surface Metrology from PI miCos

2-Axis Precision Linear Translation Stage for Surface Metrology from PI miCos

This precision motorized XY positioner handles loads of up to 20 kg and offers resolution down to 0.005 µm over a travel range of four inches, based on an interferometric linear encoder. An option with 0.001 µm resolution is also available. A precision machined base and high accuracy bearings provide straightness/flatness of two microns. Despite the high accuracy, the translation stage was designed for industrial robustness. Transmitted light
applications benefit from the large clear aperture of 150x150mm.

Very Wide Velocity Range
The stage can achieve velocities from as low as one µm/second all the up to 200 mm/second (eight inches/second). Several PI miCos motion controllers are available.

Motor and Sensor Options
Several motor and sensor options are offered. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are recommended. Several closed-loop versions are available for higher performance demands: stepper motors, DC servo motors and direct-drive electromagnetic noncontact linear motors.

For high speed operation the direct-drive linear motors are recommended. Extremely smooth motion, with constant velocity at the low end down to single digit microns/second is achieved with PI miCos stepper motors SMC Hydra motion controllers.

Multi-Axis Options
The MCS XY precision linear translation stage can be combined with linear vertical positioners, rotary positioners and goniometers from PI miCos.

Vacuum Positioners
PI miCos specializes in vacuum compatible positioning systems from 10-3 to 10-10 Torr. Basically all of our linear and rotary stages can also be ordered for vacuum use.

For more information and go to
http://www.pi-usa.us/news/news_MCS_Precision_XY_Linear_Translation_Stage_Metrology.php

Applications
Material research, microscopy, optical inspection of precision machined parts, semiconductor topographical measurements and flat-panel design.

About PI
PI is a leading manufacturer of precision motion control equipment, piezo systems, piezo motors and actuators for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard and custom precision products with piezoceramic and electromagnetic drives for four decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with 10 subsidiaries, R&D / engineering on three continents and total staff of 700+

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