Compact, XY Piezo Scanning / Nanopositioning Stage Family Covers 50 to 1800 Micron Travel Ranges, from PI

Share Article

New PIHera XY positioners with travel to 1800 µm and <1nm resolution.

XY Piezo Nanopositioning and Scanning Stage Provides More Travel

XY Piezo Nanopositioning and Scanning Stage Provides More Travel

Applications in micro-assembly, beam guidance, photonics, and optical metrology all require nanometer adjustment precision, most times in very compact spaces. To meet those requirements, PI, a lead manufacturer of nanopositioning and motion control solutions, introduces its newest XY piezo motor positioners – P-620.2 to P-629.2 – to join the existing PIHera family of over 60 compact, direct metrology stages available in a large variety of travel ranges.

Vibrationless Motion, Ultra-High Resolution Performance, Fast Response
Flexure-guided piezo positioning stages are advantageous when compared to classical mechanical bearing-driven motorized systems due to vibrationless motion, virtually unlimited resolution, and fast response. With the exclusion of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop XY-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimized package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback – usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Cost effective, positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity.

Proven Success Out of This World
Driven by PI’s proprietary PICMA® piezo ceramics (tested by NASA/JPL for 100 billion cycles and employed on the Mars Rover), PIHera piezo stages have unique properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80 C.

Read Blog - Piezo Flexure Actuators and Other Piezo Mechanisms for Precision Motion Control Applications >

Watch Video - The Piezo Effect: Mechatronics Precision Positioning/Motion Control >

Specifications, Datasheets, More Information >

Best in Class, Standard and Custom
These ultra-precise piezo mechanic nanopositioning devices are a result of PI’s 40 years of experience with piezo flexure positioners, developed by the world’s most experienced nanopositioning design teams, available for quick modification or a fully customized OEM solution. PI flexure piezo stages can repeatedly provide nanometer and sub-nanometer size steps, and their high stiffness and advanced control algorithms allow them to move and settle quickly, within a few milliseconds. PI also offers high-speed models that settle in under one millisecond. Flexure stages provide friction-free motion with excellent straightness and flatness data. Similar performance can only be achieved with air bearings and magnetic levitation guiding systems -- both technologies also offered by PI.

Share article on social media or email:

View article via:

Pdf Print

Contact Author

PIHera XY Compact Nanopositionig Stages
PI (Physik Instrumente) L.P.
+1 (508) 832-3456 Ext: 237
Email >
Visit website