New Multi-Trap® Vacuum Inlet Traps Protect Pumps in MOCVD, HVPE, GaN, and ALGaN Processes

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These new vacuum inlet traps are capable of up to 2,500 cubic inches of solids accumulation with greater than 99% efficiency for particulates and condensables.

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High capacity vacuum inlet traps protect vacuum pumps in manufacturing processes for HBLEDs and power semiconductors.

MV Multi-Trap® Vacuum Inlet Traps can be designed to accommodate various production processes and pump capacities to 2,000 CFM.

Mass-Vac, Inc. has introduced a broad range of high capacity vacuum inlet traps that protect vacuum pumps in manufacturing processes for HBLEDs and power semiconductors.

MV Multi-Trap® Vacuum Inlet Traps are ideally suited for MOCVD, HVPE, GaN, and ALGaN processes that generate high volumes of particulates and condensable byproducts in manufacturing HBLEDs and power semi- conductors. Featuring a knock-down stage plus two stages of user-selectable filter elements, these vacuum inlet traps are capable of up to 2,500 in3 of solids accumulation with greater than 99% efficiency for particulates and condensables.

Offered in 10”, 12”, and 16” dia. models, including a cooling option to facilitate removing condensables, MV Multi-Trap® Vacuum Inlet Traps can be designed to accommodate different production processes and pump capacities to 2,000 CFM. They are available with activated alumina or charcoal filter elements for vapors, Sodasorb®, and other specialized elements for trapping other contaminants.

MV Multi-Trap® Vacuum Inlet Traps are priced from $2,900.00, depending upon size and configuration. Price quotations are available upon request.

For more information contact:

Mass-Vac, Inc.
David Rolph, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014

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David Rolph
Mass-Vac, Inc.
+1 (978) 667-2393
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