New High-Load, High Precision Rotation Stage from PI miCos

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PI miCos introduces the UPR 270 AIR high-load precision rotation stage.

Precision Rotation Stage

Precision Rotation Stage

Air Bearings for Ultra-High Precision, Ball Bearings for High Precision
The positioning stage is available in two versions, high accuracy with ball bearings and ultra-high accuracy with air bearings. The stages were developed for robotics, laser and synchrotron applications as well as semiconductor wafer inspection, and optical metrology.

The direct-drive torque motor renders mechanical worm gears and gear reduction unnecessary increasing both velocity and accuracy.

High Precision Encoders
The stages feature a reference class optical encoder for angular resolution to 0.00002 deg with reproducibility of 0.00003 deg.

The air bearing versions have extremely low wobble of 1.25 ╬╝rad as well as low eccentricity ±70 nanometers.

The long-life torque motor provides a maximum speed of 360 °/second

A brochure on the Rotary Stages is available for download at:

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