KLA-Tencor Introduces New P-6 Surface Profiler System for Scientific
and Solar Metrology
MILPITAS, Calif. (Business Wire EON/PRWEB ) July 14, 2008 --
KLA-Tencor (NASDAQ:KLAC) today unveiled its latest stylus surface
profiling system, the P-6™, offering a unique
set of advanced features for scientific research and production
environments, such as photovoltaic solar cell manufacturing. The P-6
system benefits from measurement technologies developed on advanced
semiconductor profiler systems, but in a smaller, more economical bench
top design for samples up to 150mm.
“We are excited about the P-6 stylus profiler
introduction to provide scientific and solar customers with the best mix
of features for their applications,” said Jeff
Donnelly, group vice president of Growth and Emerging Markets at
KLA-Tencor. “For the solar market, the P-6 has
the resolution, scan quality and automation needed to improve solar cell
efficiencies in the development stage, as well as monitor process
quality in production.”
The P-6 stylus profiler continues the tradition of best-in-class
technology and performance by incorporating many features from KLA-Tencor’s
automated P-16+ stylus profiler:
-
Low noise floor improves measurement sensitivity to characterize small
topography
-
Less than 6Å step height repeatability
ensures stringent process control
-
150mm X-Y sample stage enables single measurement to cover full
substrate
-
2D stress measurement and analysis minimizes defects and improves yield
-
Powerful yet easy to use analysis software offers flexibility for
advanced applications
The P-6 profiler has been qualified at BP Solar, a major photovoltaic
manufacturer. “Our evaluation of KLA-Tencor’s
P-6 system demonstrated high sensitivity to a range of process
conditions for multiple surface metrology applications, including ARC
films, emitter contacts, and front surface texture,”
said Eric Daniels, vice president of technology at BP Solar. “The
P-6 will be a valuable asset for supporting our technology development
and manufacturing improvement efforts.”
The P-6 system will be on display at KLA-Tencor’s
booth #9252 at InterSolar North America in San Francisco, July 15 to 17,
2008.
About KLA-Tencor: KLA-Tencor is the world leader in yield
management and process control solutions for semiconductor manufacturing
and related industries. Headquartered in Milpitas, California, the
Company has sales and service offices around the world. An S&P 500
company, KLA-Tencor is traded on the NASDAQ Global Select Market under
the symbol KLAC. Additional information about the Company is available
at http://www.kla-tencor.com
(KLAC-P).
See the original story at: http://eon.businesswire.com/releases/tencor/solar/prweb1106614.htm
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