KLA-Tencor Introduces New P-6 Surface Profiler System for Scientific and Solar Metrology

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KLA-Tencor (NASDAQ:KLAC) today unveiled its latest stylus surface profiling system, the P-6™, offering a unique set of advanced features for scientific research and production environments, such as photovoltaic solar cell manufacturing. The P-6 system benefits from measurement technologies developed on advanced semiconductor profiler systems, but in a smaller, more economical bench top design for samples up to 150mm.

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Our evaluation of KLA-Tencor's P-6 system demonstrated high sensitivity to a range of process conditions for multiple surface metrology applications, including ARC films, emitter contacts, and front surface texture

"We are excited about the P-6 stylus profiler introduction to provide scientific and solar customers with the best mix of features for their applications," said Jeff Donnelly, group vice president of Growth and Emerging Markets at KLA-Tencor. "For the solar market, the P-6 has the resolution, scan quality and automation needed to improve solar cell efficiencies in the development stage, as well as monitor process quality in production."

The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:

Low noise floor improves measurement sensitivity to characterize small topography Less than 6Å step height repeatability ensures stringent process control 150mm X-Y sample stage enables single measurement to cover full substrate 2D stress measurement and analysis minimizes defects and improves yield Powerful yet easy to use analysis software offers flexibility for advanced applications The P-6 profiler has been qualified at BP Solar, a major photovoltaic manufacturer. "Our evaluation of KLA-Tencor's P-6 system demonstrated high sensitivity to a range of process conditions for multiple surface metrology applications, including ARC films, emitter contacts, and front surface texture," said Eric Daniels, vice president of technology at BP Solar. "The P-6 will be a valuable asset for supporting our technology development and manufacturing improvement efforts."

The P-6 system will be on display at KLA-Tencor's booth #9252 at InterSolar North America in San Francisco, July 15 to 17, 2008.

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in Milpitas, California, the Company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the NASDAQ Global Select Market under the symbol KLAC. Additional information about the Company is available at http://www.kla-tencor.com (KLAC-P).

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