SMI Launches MEMS Low Pressure Sensor for Respiratory Market

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SMI launches the new SM9541 MEMS low pressure sensor series especially designed for the Respiratory Market with a friendly digital interface and 14-Bit resolution. With industry leading accuracy at less than 1%, medical design engineers will appreciate the high level of performance, stability, and customization flexibility.

"The SM9541 Series can be customized for various pressure and temperature ranges, supply voltages, and individually addresses."

SMI (Silicon Microstructures, Inc.) introduces the SM9541 MEMS low pressure sensor Series designed especially for the medical respiratory market. The unique compound gauge offering allows for optimal signal resolution and diagnostics capability. The 14-Bit resolution and 1% accuracy provide the user high performance while the 0.2% full-scale offset stability per year provides the reliability and long-term reliability for critical care products. Available in low pressure ranges of 10, 20, 40, and 100 cm∙H2O (0.14, 0.3, 0.6, and 1.4 PSI). With custom solutions available, the SM9541 stands to revolutionize the next generation of respiratory healthcare products with an I2C digital interface coupled with the highest accuracy and stability in the industry.

At the heart of the SM9541 is the MEMS pressure transducer with SMI’s novel and proprietary silicon technology platform. With SMI’s technology, the user can attain the highest level of accuracy with long-term high performance as demanded of the stringent medical industry. Mating with the MEMS pressure sensor is a state-of-the-art signal-conditioning IC providing full pressure calibration and temperature compensation with a user-friendly I2C digital interface. The pressure sensor housing is based on standard surface mount technology standards and features a JEDEC compliant SOIC-16 footprint for straight-forward PCB design and assembly. Design engineers will appreciate the design flexibility and repeatability of the SM9541 Series. Fully qualified and in production, the SM9541 is ready for design-in and user qualification.


  • Sleep Apnea (CPAP, MPAP)
  • Ventilators/Anesthesia Equipment
  • Oxygenators
  • Spirometers


  • Compensated Temperature Range: -5oC to +65oC
  • Accuracy: ±1% FS
  • I2C Digital Interface
  • 14-bit Resolution
  • Voltage Supply: 3.3 Volts
  • Complies with RoHS and REACH requirements

“We are very excited to debut the SM9541 Series with the respiratory equipment manufacturers at AARC and solidify our commitment to the medical industry. Our new MEMS sensor technology is the culmination of our low pressure expertise and we expect it will impress medical designer engineers,” said Dr. Michael Doelle, Vice-President of Marketing at SMI.

SMI debuts the SM9541Series at AARC Congress 2013 in Anaheim, California, November 18.

About SMI
SMI is an ISO/TS16949:2009 certified premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with over 22 years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today.

SMI is a member of the worldwide Elmos Semiconductor Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.

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Raul Figueroa

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