Modutek Corporation Partners with WRS Materials on 450mm Wafer Cleaning Development Project

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Modutek has teamed up with WRS to provide wet processing equipment for 450mm Reclaim Line that fulfills requirements for the next generation of semiconductors.

450mm Wet Processing Equipment

450mm Wet Processing Equipment

Doug Wagner, President/CEO of Modutek Corporation, stated "We were able to offer WRS new processing methods that will help them provide critical cost effective solutions to their customers."

Modutek Corporation is partnering with WRS Materials, a leader in silicon wafer polishing services; on a 450mm wafer cleaning development project. Richard Mee, President of WRS Materials, stated “Modutek Corporation’s expertise on tank design and wet clean technology was crucial to our 450mm upgrade”. The new Cleaning line will feature Modutek custom designed chemical baths that will incorporate Kiajo megasonics and custom wafer furniture capable of handling five 450mm wafers per fixture.

Doug Wagner, President/CEO of Modutek Corporation, stated, “We were able to offer WRS new processing methods that will help them provide critical cost effective solutions to their customers. It will work to reduce the overall cost of the initial 450mm investments.”    He went on to say, “Our collaboration with WRS provided us the opportunity to utilize our custom designed semiconductor wet processing equipment and ensures they meet all SEMI standard requirements.”

This new reclaim line is among the first in operation globally and will reclaim 450mm wafers for most of the blue chip OEM’s. With a growing demand and the high cost of 450mm silicon wafers, reclaiming wafers will be a vital resource to the industry for many years to come.

Worldwide, the 2011 reclaim wafer market was estimated at $374 million and is expected to reach as high as $413 million in 2013. “Technology advancements are driving higher quality standards, these new specifications demand constant investment in better tool sets, strong engineering support and improved training for our production staff. Fortunately we have found a willing partner in Modutek to help in all three areas”, commented Richard Mee.

Wagner added, “Modutek’s Megasonic Cleaning Equipment offers a precision cleaning system that was developed for the unique requirements of the Semiconductor, FPD, Hard Disk, Solar and Crystal industries. Our engineers work closely with our customers to provide a solution for each specific application.”

About Modutek Corporation:
Originally founded in 1980, Modutek has over thirty years of providing semiconductor manufacturing equipment solutions. They work directly with clients from the start of the design process, to the installation, and continue on through the final acceptance of the project. Along with their in-house manufacturing capabilities in semiconductor wet processing equipment, Modutek provides specialized high temperature quartz heated baths, sub-ambient filtration systems, nitride etch baths, and rinsing systems. They provide a one-stop destination for custom designed processing stations.

About WRS Materials – WRS Materials, LLC, based in San Jose, CA was formed through an acquisition in January 2008. In August 2008 WRS acquired Montco Silicon Technologies, Spring City, PA. Prior to the Isonics acquisition, WRS and Montco provided a complete semiconductor silicon “standard” wafer source in the 50mm -300mm range. East and West Coast locations facilitate faster customer distribution, often with same day shipments for off-the-shelf orders. With over one million 50mm-450mm wafers in stock, WRS can meet most any customer silicon requirement, with the most silicon solutions, for the best price. A full line of in-house services includes: polishing, lapping and etching services, cleaning services, prime and test wafers, custom films, quartz wafers, stripping of oxides, SOI wafers, silicon ingots and reclaim services.

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Joanne Turley
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