SEMATECH and Newly Merged SUNY CNSE/SUNYIT Partner in Launch of Innovative Planarization Center

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Collaborative venture pairs best-in-class tool resources and global supplier network to offer broader scope and lower cost of ownership for process technology development.

The new CMP Center will create cross-center synergies to drive technical excellence and reduce the overall cost of ownership in the development of next-generation technology.

SEMATECH and the newly merged SUNY College of Nanoscale Science and Engineering (CNSE)/SUNY Institute of Technology (SUNYIT) today jointly announce the creation of the Chemical Mechanical Planarization (CMP) Center, based at the Albany Nanotech Complex. The Center aims to accelerate the development of next generation CMP technology, and to drive improvement in the yield and cost of ownership of CMP processes.

“In support of Governor Andrew Cuomo’s commitment to New York’s global leadership in developing next generation technologies, we are excited to partner with SEMATECH to develop technology for the manufacturing of future nanoelectronics devices,” said Christopher Borst, Associate Vice President for G450C Technical Operations and Associate Professor of Nanoengineering at the newly merged CNSE/SUNYIT. “Through access to the newly merged CNSE/SUNYIT’s advanced fabrication facilities, we will enable a center of excellence with world-class capabilities for development of leading-edge process solutions for future generation technologies.”

“The CMP Center is an important part of our strategy to provide our members with the critical capabilities needed to accelerate process maturity for end users,” said Edward Barth Director of Strategic Growth Initiatives at SEMATECH. “In addition to SEMATECH’s network of consortium members, the newly merged CNSE/SUNYIT’s leadership in providing state-of-the-art process and metrology toolsets will enable the development of new materials and CMP processes in further scaling of IC devices."

As semiconductor dimensions are scaled, advances in test structures and process flows are critical for accelerating process development to support industry needs. The new planarization center, a vital component of the newly merged CNSE/SUNYIT and SEMATECH’s process technology efforts, will serve as a technology test-bed that will enable participating companies to develop, demonstrate, integrate and qualify advanced CMP technologies for the semiconductor industry.

“The CMP community have been asking for this and the newly merged CNSE/SUNYIT and SEMATECH have responded loud and clear,” said Frank Tolic, Associate Vice President for Business, Wafer Processing of the newly merged CNSE/SUNYIT. “Leveraging our combined strengths creates the next generation of cost effective test vehicles, test wafers, and industry know-how that will lead the CMP community successfully through the next technology generations.”

“This collaborative venture incorporates the newly merged CNSE/SUNYIT’s and SEMATECH’s joint technical expertise and industry vision, with CNSE/SUNYIT’s state-of-the-art equipment,” said Satyavolu Papa Rao, Director of Process Technology, SEMATECH. “The entire CMP ecosystem, including consumable suppliers, tool and metrology vendors, and end users such as IDMs, foundries and fabless companies, can partner to establish industry standard test structures and develop solutions to meet the needs of sub-20 nm technology nodes.”

The new CMP Center, along with other Centers being established, will create cross-center synergies to drive technical excellence and reduce the overall cost of ownership in the development of next-generation technology.

For more information on the Planarization Center membership and participation, please contact Edward Barth at edward.barth(at)sematech(dot)org, Papa Rao at satyavolu.paparao(at)sematech(dot)org, or Frank Tolic at ftolic(at)albany(dot)edu.

For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at Twitter:

About SUNY CNSE. The SUNY College of Nanoscale Science and Engineering (CNSE) is the world leader in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE represents the world’s most advanced university-driven research enterprise, with more than $20 billion in high-tech investments and over 300 corporate partners. The 1.3 million-square-foot Albany NanoTech megaplex is home to more than 3,100 scientists, researchers, engineers, students, and faculty. CNSE maintains a statewide footprint, operating the Smart Cities Technology Innovation Center (SCiTI) at Kiernan Plaza in Albany, the Solar Energy Development Center in Halfmoon, the Photovoltaic Manufacturing and Technology Development Facility in Rochester, and the Smart System Technology and Commercialization Center (STC) in Canandaigua. CNSE co-founded and manages the Computer Chip Commercialization Center (Quad-C) at SUNYIT and is lead developer of the Marcy Nanocenter site in Utica, as well as the Buffalo High-Tech Manufacturing Complex, Buffalo Information Technologies Innovation and Commercialization Hub, and Medical Innovation and Commercialization Hub. For information, visit

About SUNYIT. SUNYIT, the State University of New York Institute of Technology at Utica/Rome, is New York’s public polytechnic, offering undergraduate and graduate degree programs in technology and professional studies. Its academic offerings in technology, including engineering, cybersecurity, computer science, and the engineering technologies, and its programs in professional studies, including business, communication, and nursing, are complemented by athletics, recreational, cultural and campus life programs, events, and activities. Founded in 1966, SUNYIT is a unique high-tech learning environment on hundreds of acres, offering degree programs online as well as on campus. The SUNYIT family of alumni now numbers 25,000. For information, visit

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