Kurita Joins SEMATECH to Advance Wafer Surface Contamination and Cleaning Technology in Semiconductor Processing Applications

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Collaboration to address critical technology gaps in contamination control in ultrapure water systems

Ultrapure water plays a critical role in manufacturing today's extremely compact semiconductor chips and, as such, SEMATECH continues to expand our expertise and capabilities in liquid-phase defectivity, including ultrapure water, chemicals and resists.

SEMATECH, the global consortium of chipmakers, announced today that Kurita Water Industries Limited, a leader in the water treatment and environmental industries, has partnered with SEMATECH to develop innovative technologies for low defectivity ultrapure water (UPW) applications used in semiconductor manufacturing.

“SEMATECH, along with leading suppliers, is working to improve preparation and cleaning techniques by both optimizing existing technologies, testing novel methods and developing new characterization technologies that will address current and projected challenges in semiconductor and wafer manufacturing processes,” said Kevin Cummings, SEMATECH’s Director of Lithography. “The collaborative effort between SEMATECH and Kurita illustrates the demand for next-generation ultrapure water systems in the semiconductor industry.”

As a SEMATECH member, Kurita will collaborate with metrology, process and manufacturing experts at SEMATECH to identify and develop UPW defect removal techniques that will improve capabilities for key process applications in semiconductor manufacturing.

“Ultrapure water plays a critical role in manufacturing today's extremely compact semiconductor chips and, as such, SEMATECH continues to expand our expertise and capabilities in liquid-phase defectivity, including ultrapure water, chemicals and resists,” said Edward Barth, SEMATECH’s Director of Strategic Growth Initiatives. “As a leader in metrology techniques, SEMATECH will leverage Kurita's unique ultrapure water technology to investigate methods for improving lifecycle costs and increasing efficiency of critical manufacturing process applications and equipment components.”

About Kurita Water Industries
Kurita Water Industries Ltd. manufactures, sells, and maintains water treatment equipment and systems. The Company's products include water purification and waste water treatment equipment as well as soil remediation systems. Kurita also manufactures and sells chemicals for water treatment related to sanitation, air-conditioning, and construction. For more information, please visit https://www.kurita.co.jp/english/

About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at http://www.sematech.org. Twitter: http://www.twitter.com/sematech

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Erica McGill
SEMATECH
518-649-1041
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