New Tool for 3D FinFETs to 10 nm and Beyond

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New high aspect ratio (HAR) carbon probe technology for atomic force microscopy (AFM). Carbon Design Innovations, Inc.’s TN-HAR represents the toughest HAR probe available on the market today.

"High aspect ratio AFM probes have been developed by CDI to measure Critical Dimensions of 3D features"

Carbon Design Innovations, Inc. has created probes for atomic force microscopes that represent the ‘next generation’ in imaging technology. CDI’s TN-HAR tips radically improve AFM, keeping up with the new development in MosFETs, and stimulating new innovations in materials science and energy technologies. The need for 3D metrology is becoming more urgent to address critical gaps in metrology for both lithographic and etch processes. Recent advances in gate process technology also raise challenges to traditional top-down metrology. One such example is the FinFET, which is truly a 3D device with 3D metrology needs. The ability to measure the bottom width of a profile is crucial for process control. Recently, high aspect ratio AFM probes have been developed by CDI to measure Critical Dimensions of 3D features. This is an important achievement in AFM metrology.

“Our carbon TN-HAR tips offer a way of extending the depth of profiling,” says Ramsey M. Stevens, Founder and President of Carbon Design Innovations, Inc. CDI’s TN-HAR probes are universally applicable across all AFM platforms. “The carbon provides a very high aspect ratio AFM probe and the composite construction makes it even stronger. This allows researchers to expand the effective depth of the imaging to even microns,” Stevens explains.

This ‘ultimate probe’ provides plug-and-play ease of use, high performance, and long life. All of this is delivered at a reduced cost of ownership, due to an effective probe lifetime that averages 50 times that of existing silicon probes. Now CDI’s TN-HAR provides universal optimum HAR performance at a lower cost per scan. Acceptance has been outstanding in such varied industries as semiconductors, aerospace, university development and energy. They can be used on the following samples: FinFETs, MOSFETs, Si wafers, sapphire, glass, polymers, ITO, protein, DNA, MEMS, nanowells, beads, tungsten, irregular shaped objects, etc.

About Carbon Design Innovations, Inc.
Carbon Design Innovations develops and manufactures carbon nanotube devices based on a patented, deterministic methodology. The company’s initial focus is on manufacturing AFM probes. The company was founded by AFM and CNT industry veteran and company president, Ramsey M. Stevens in January, 2008. The Director of Sales and Board of Directors all have extensive semiconductor backgrounds, coupled with AFM experience.

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Lori-Anne Manalo
Carbon Design Innovations
since: 07/2014
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