New Mass-Vac Vacuum Pump Inlet Traps Remove Residual Solvent Vapor Acids and Particulates to Protect Vacuum Pumps Used in ALD Processes

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Mass-Vac, Inc. has introduced a new line of vacuum pump inlet traps that prolong pump life and reduce service intervals for vacuum pumps used in Atomic Layer Deposition (ALD) processes. Offered in sizes for use in R/D labs and production facilities, they are fully customizable by the user.

Sizes are offered for use in R/D laboratories and production facilities.

Sizes are offered for use in R/D laboratories and production facilities.

Two models for ALD Processes are offered: the MV Multi-Trap® for production use that is capable of up to 2,500 cubic inches of solids accumulation and the PosiTrap® which is suitable for smaller applications.

Mass-Vac, Inc. has introduced a new line of vacuum pump inlet traps that prolong pump life and reduce service intervals for vacuum pumps used in Atomic Layer Deposition (ALD) processes.

MV Vacuum Inlet Traps for ALD Processes utilize replaceable filter elements including stainless steel gauze, micron-rated polypropylene, activated alumina or charcoal, Sodasorb®, and other types to remove residual solvent vapor acids and particulates. Fully customizable by the user, they are offered in sizes for use in R/D laboratories and production facilities.

Featuring stainless steel construction and multiple plumbing options, two models for ALD Processes are offered: the MV Multi-Trap® for production use that is capable of up to 2,500 IN3 of solids accumulation and the PosiTrap® which is suitable for smaller applications. The MV Multi-Trap® includes a knock-down stage and can be configured with up to six stages of filters or a single large 13” H x 14” dia. pleated high-temp. polyester filter.

MV Vacuum Inlet Traps for ALD Processes are priced depending upon size and configuration. Price quotations are available upon request.

For more information, contact:
Mass-Vac, Inc.
David Rolph, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393
FAX (978) 671-0014
e-mail: drolph(at)massvac(dot)com
http://www.massvac.com

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