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Compact Piezo Stages with Novel Bi-Phase Motors Provide 10nm Resolution


News provided by

PI (Physik Instrumente) LP

May 13, 2025, 08:13 ET

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PI’s B-421 miniaturized piezo stages provide 10nm positioning resolution in an extremely compact package.  X, XY, XZ and XYZ combinations are available, with travel ranges from 13 to 32mm.
PI’s B-421 miniaturized piezo stages provide 10nm positioning resolution in an extremely compact package. X, XY, XZ and XYZ combinations are available, with travel ranges from 13 to 32mm.

Accurate linear motion in an extremely compact package, new from PI

AUBURN, Mass., May 13, 2025 /PRNewswire-PRWeb/ -- PI, a global leader in nanopositioning, precision motion control systems, and air bearing technology, introduces the innovative B-421 BIX nanopositioning stages — compact, high-precision linear positioning systems designed for applications requiring reliable and accurate motion in extremely space-constrained environments.

Equipped with integrated linear encoders with 6 nanometer position resolution and advanced dual-phase piezo inertia motors, BIX stages deliver smooth, backlash-free performance with excellent repeatability, and a minimum incremental motion of just 0.01 microns per step.

Unlike conventional stick-slip motor stages, the BIX series utilizes two miniature piezo stacks, manufactured in-house by PI's piezo ceramics division, PI Ceramic. This advanced bi-phase inertia drive technology delivers higher drive and holding forces, increased velocity, and extended operational lifetime compared to traditional stick-slip solutions.

XY, XZ, and XYZ Multi-axis Stage Combinations
The BIX linear stage design supports multi-axis configurations and offers travel ranges of up to 32mm, making these miniature nanopositioning stages ideal for high-precision motion applications, such as bio-nanotechnology, super-resolution microscopy, metrology, life sciences, spectroscopy, micro-assembly, photonics, semiconductor manufacturing, and interferometry.

Stick-Slip Drive Technology Background
Stick-slip inertia motors operate on a principle similar to the classic tablecloth trick, using piezoelectric actuators driven by a modified sawtooth voltage signal from dedicated control electronics. During the slow expansion phase, the actuator gradually moves a runner forward. When the actuator contracts rapidly — within microseconds — the runner's inertia prevents it from following, resulting in net forward motion. A symmetrical motor configuration ensures consistent performance in both forward and reverse directions.

Piezo Motor Controller and Software
The E-881 BIX piezo motor controller is designed for high-performance control of low-voltage, two-phase stick-slip piezo motors, enabling smooth, precise motion with nanometer resolution. It features integrated encoder feedback, digital servo control electronics, and is compatible with PI's PIMikroMove® software. Communication is supported via USB and TCP/IP interfaces. Additional features include programmable digital outputs, and a built-in data recorder. The controller comes with an extensive set of drivers, e.g., for use with C, C++, C#, NI LabVIEW, MATLAB, Python, and a virtual startup emulator for testing without hardware.

Industries Served
Metrology, super-resolution microscopy, life sciences, spectroscopy, interferometry, micro-assembly, photonics, semiconductor technology and bio-nanotechnology.

Specifications, datasheet: B-421 BIX Miniature Linear Stage

PI Americas
https://www.pi-usa.us | [email protected] | (508) 832-3456
Applications Blog | Videos | LinkedIn

Media Contact

PI Press Releases, PI (Physik Instrumente) LP, (508) 832-3456, [email protected], https://www.pi-usa.us/

SOURCE PI (Physik Instrumente) LP

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