Mass-Vac's new MV Vacuum Pump Inlet Traps Protect Pumps in Deposition Processes

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A broad range of user-customizable vacuum pump inlet traps for production and research processes involving ALD, LPCVD, PECVD and related deposition processes are available from Mass-Vac, Inc. of No. Billerica, Massachusetts.

Featuring user-selectable filter media, the traps come in multiple configurations for protecting vacuum pumps from heavy particulates.

Featuring user-selectable filter media, the traps come in multiple configurations for protecting vacuum pumps from the heavy particulate byproducts caused by ALD, LPCVD, PECVD and related processes.

Ideally suited for research laboratories, semiconductor fabrication, and industrial coating facilities, they can be configured to provide up to 2,500 cu.in. of solids accumulation.

Mass-Vac, Inc. has introduced a broad range of customizable vacuum pump inlet traps for production and research processes involving ALD, LPCVD, PECVD and related deposition processes.

MV Vacuum Pump Inlet Traps are fabricated from stainless steel and come in several sizes that can be tailored to user requirements for protecting vacuum pumps from the heavy particulate byproducts of ALD, LPCVD, PECVD, and related deposition processes. Ideally suited for research laboratories, semiconductor fabrication, and industrial coating facilities, they can be configured to provide up to 2,500 cu.in. of solids accumulation.

Featuring user-selectable filter media, MV Vacuum Pump Inlet Traps can be fitted with stainless steel gauze, copper gauze, polypropylene in 2, 5, and 20 micron sizes, Sodasorb®, activated alumina, activated charcoal and molecular sieve. The 8” dia. PosiTrap® is ideal for research labs and the 12” dia. MultiTrap®, which has a first stage knockdown baffle and two filtration stages, and can be stacked to provide 4-stages of filtration.

The PosiTrap® and MultiTrap® 12” Vacuum Pump Inlet Traps are priced from $625.00 to $2,895.00. Larger 16” units are also offered from $4,800.00.
Filter elements are sold separately. Pricing is available upon request.

For more information contact:

Mass-Vac, Inc.
David Rolph, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014
e-mail: drolph@massvac.com
http://www.massvac.com

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