Miniature Multi-Axis Stages for Vacuum Applications: New Mini 6-DOF Hexapod 6-Axis Robotic Stage

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Compact multi-axis stages offer advantages in vacuum applications because they can fit in a small vacuum chamber contributing to big cost savings. PI offers a high-precision, miniaturized 6-axis Hexapod motion system, based on a parallel kinematics design, ideal for precision motion and alignment of optics, photonics, and semiconductor applications.

New vacuum-compatible hexapod provides highly accurate motion in 6 degrees of freedom in a compact space.

New vacuum-compatible hexapod provides highly accurate motion in 6 degrees of freedom in a compact space.

PI’s new H-811 vacuum compatible miniature 6-axis hexapod robotic stage provides high performance and high accuracy motion in a very small package. Hexapod multi-axis stages are used in active optical alignment and photonics applications due to their fast response and versatility. A programmable center of rotation (pivot point) allows the user to adapt the motion system to any alignment application quickly without retooling. PI’s hexapod design experience spans 4 decades and a large variety of models for different load, speed, force, dynamics, and size ratings including applications from silicon photonics alignment to medical treatment and antenna feeds for astronomical telescopes.

PI’s hexapod family is growing with the addition of H-811.I2V vacuum hexapod. With a load capacity of 5kg and linear travel ranges up to 34mm and rotary ranges up to 42°, the new hexapod provides very high resolution and repeatability ±0.06µm.

Hexapod Controller / Motion Software
PI’s hexapod controllers and hexapod software are based on decades of experience with parallel kinematic motion systems. They are easy to program, allow the user to change the center of rotation with one command, and come with high level alignment functions built in. PI’s free hexapod software simulates the limits of workspace and load capacity, thereby ensuring the hexapod you choose will handle the loads, forces, and torques in your application.

Specifications, Datasheet, More Information
H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod Datasheet

Other Vacuum and UHV Positioning Products
PI provides a wide range of additional high vacuum and ultra-high vacuum compatible precision positioning stages such as linear stages and rotary tables for nano-positioning and micro-positioning applications, including piezo flexure stages, piezo motor solutions, and even multi-axis motion systems such as 6-DOF hexapod parallel positioners to cover the most demanding vacuum motion requirements. Industries served include semiconductors, aerospace, optics and photonics, precision automation, life-sciences, and big science research.

Working with You
PI’s in-house engineered solutions have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of proven motion technologies and methodologies, PI is in the position to quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of your application from sensors and piezo transducers to microscope nano-focus units, fast photonics alignment systems to multi-axis automation sub-systems.

USA / Canada | |(508) 832-3456

About PI
PI is a privately held company that designs and manufactures world-class precision motion and automation systems including air bearings, hexapods and piezo drives at locations in North America, Europe, and Asia. The company was founded 5 decades ago and today employs more than 1300 people worldwide. PI’s customers are leaders in high-tech industries and research institutes in fields such as photonics, life-sciences, semiconductors, and aerospace.

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New Mini 6-DOF Vacuum Hexapod: H-811
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