Park Systems Introduces Park NX-TSH a High Resolution, Automated Tip Scanning Head (TSH) for Industrial Large Sample AFM at Semicon China and Semicon West

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Park Systems Inc., world-leading manufacturer of Atomic Force Microscopes (AFM) is announcing Park NX-TSH, automated Tip Scan Head for large sample analysis over 300 mm. Park Systems will present Park NX-TSH at Semicon China June 27-29 in their booth E7549 at the Shanghai New International Expo Centre and at their virtual display at Semicon West.

Park NX-TSH – Automated AFM tip scanning head for ultra large and heavy samples like flat panel displays over 300mm

“Park Systems has scaled up their AFM tools for Gen10+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the only automated Tip Scan Head for large sample analysis over 300 mm,” Keibock Lee, Park Systems President.

Park Systems Inc., world-leading manufacturer of Atomic Force Microscopes (AFM) is announcing Park NX-TSH, automated Tip Scan Head for large sample analysis over 300 mm. Park NX-TSH is for large and heavy sample flat panel display glass and features conductive AFM for electric defect analysis by integrating a micro probe station.

Park Systems will present Park NX-TSH at Semicon China June 27-29 in their booth E7549 at the Shanghai New International Expo Centre and at their virtual display at Semicon West.

The Tip Scanning Head (TSH) is an automated moving tip head for industrial AFM measurements on large samples over 300 mm developed for OLED, LCD, Photonics for large sample analysis. The automated Tip Scan Head moves on an air-bearing stage technology and combines the x, y, z scanners moving directly to the desired point on the substrate.

“Park NX-TSH was developed specifically for manufacturers setting up fabs to produce next-generation flat panel displays with the objective to overcome the 300mm size threshold limit,” states Keibock Lee, Park Systems President. “Using conductive AFM, Park NX-TSH measures the sample surface with an optional probe station that contacts the sample surface and provides current into small devices or chips.”

As the demand for larger flat panel displays increases to 65”, 75” and more, the automated Park NX-TSH system overcomes nano metrology challenges with a gantry style tip scanner system that moves directly to a place on the sample and produces high resolution images of the roughness measurement, step height measurement, critical dimension and sidewall measurements.

Park NX-TSH can scan tip in x, y and z directions, up to 100 µm x 100 μm (x-y direction) and 15 μm z direction, and has a flexible chuck to accommodate large and heavy samples.

“Park Systems has scaled up their AFM tools for Gen10+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the only automated Tip Scan Head for large sample analysis over 300 mm,” adds Lee.

The sample is fixed on a sample chuck and the tip scanning head attached to the gantry moves to measurement positions on the surface sample. The Park NX-TSH tip scanning head system overcomes the limitations of sample size and weight since the sample is fixed on the sample chuck.

Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at nanoscale and with Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more, in a gantry style bridge system improving productivity and quality.

Visit the Park Systems Booth at Semicon China or their Virtual Booth at Semicon West to learn more about Park NX-TSH and see the Park NX-TSH video at parksystems.com/tsh/video.

For more information, please visit parksystems.com/nx-tsh or email inquiry@parksystems.com.

About Park Systems
Park Systems is the fastest growing and world-leading manufacturer of atomic force microscopy (AFM) systems, with a complete range of products for researchers and engineers in the chemistry, materials, physics, life sciences, semiconductor and data storage industries. Our mission is to enable nanoscale advances for scientists and engineers solving the world’s most pressing problems and pushing the boundaries of scientific discoveries and engineering innovations. Customers of Park Systems include most of the world’s top 20 largest semiconductor companies and national research universities in Asia, Europe and the Americas. Park Systems is a publicly traded corporation on the Korea Stock Exchange (KOSDAQ) with corporate headquarters in Suwon, Korea, and regional headquarters in Santa Clara, California, USA, Mannheim, Germany, Beijing, China, Tokyo, Japan, Singapore, and Mexico City, Mexico. To learn more about Park Systems, please visit http://www.parksystems.com.

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