Park Systems Introduces Park SmartLitho™ for Nanolithography and Nanomanipulation at the Virtual ACS Conference

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Park Systems, world leader in Atomic Force Microscopy (AFM), announces Park SmartLitho™, a newly added software to the revolutionary Park SmartScan™ operating system on Park Systems AFM systems. Park SmartLitho is next-generation nanopatterning technology for nanodevices, offering significant potential for customized nanosensor surface modification.

The above design is nanoscale oxide patterns generated by voltage-biased AFM nanolithography using Park NX10 and Park SmartLitho software

The many applications for SmartLitho include the creation of integrated circuits and parts for semiconductor technology, where the ability to construct extremely compact transistors and circuits enables the building of smaller devices, as well as improving their power efficiency and performance.

Park Systems, world leader in Atomic Force Microscopy (AFM), announces Park SmartLitho,™ a newly added software to the revolutionary Park SmartScan™ operating system on Park Systems AFM systems. Park SmartLitho is next-generation nanopatterning technology for nanodevices, offering significant potential for customized nanosensor surface modification.

Nanolithography processes are controlled by Park SmartLitho using a convenient user interface, which makes the lithography process as easy as drawing a picture with simple graphics user interface. Just by manipulating the mouse, objects can be easily drawn, resized, and moved. Bitmap images can be imported for raster and vector nanolithography.

“Park SmartLitho is an AFM based nanolithography or nanomanipulation software integrated into Park SmartScan operating system, a well-known AFM OS for every user from amateurs to experts” states Keibock Lee, Park Systems President. “The many applications for SmartLitho include the creation of integrated circuits and parts for semiconductor technology, where the ability to construct extremely compact transistors and circuits enables the building of smaller devices, as well as improving their power efficiency and performance.”

Park SmartLitho performs nanolithography by applying either excessive force or voltage bias. For the normal nanolithography mode using a Park AFM system, the available range of the applied voltage is -10 V to +10 V. For special situations requiring a higher voltage range, High Voltage Nanolithography mode is available. With the External High Voltage Tool Kit, the AFM system can be connected to an external voltage amplifier, enabling the experiments or measurements to use a tip or sample bias exceeding 10 V. The available voltage range for High Voltage Lithography depends on the external voltage amplifier used.

The Park SmartLitho software offers a variety of lithography modes and supports both vector mode and raster mode.

“Using Park SmartLitho, a bias-assisted nanopatterning of complicated structures can be readily done by locally oxidizing the surface of a silicon wafer and switching ferroelectric domains of a PZT film,” adds Lee.

Furthermore, Park SmartLitho provides nanomanipulation applications with easy-to-use drawing editor and user interface environment for setting targeted object manipulation parameters.

The highly user-friendly Park SmartLitho allows even inexperienced and untrained users to perform lithography and nanomanipulation with proficiency, accuracy and speed. Park Systems state-of-the-art SmartLitho also operates in a closed-loop system to produce vector nanolithography, crucial for today’s advanced circuit designs and structures. Hence, Park SmartLitho provides a complete solution to device engineering applications.

Visit the Park Systems Virtual Booth at ACS to learn more about Park SmartLitho or go: to http://www.parksystems.com/smartlitho

About Park Systems

Park Systems is the fastest growing and world-leading manufacturer of atomic force microscopy (AFM) systems, with a complete range of products for researchers and engineers in the chemistry, materials, physics, life sciences, semiconductor and data storage industries. Our mission is to enable nanoscale advances for scientists and engineers solving the world’s most pressing problems and pushing the boundaries of scientific discoveries and engineering innovations. Customers of Park Systems include most of the world’s top 20 largest semiconductor companies and national research universities in Asia, Europe and the Americas. Park Systems is a publicly traded corporation on the Korea Stock Exchange (KOSDAQ) with corporate headquarters in Suwon, Korea, and regional headquarters in Santa Clara, California, USA, Mannheim, Germany, Beijing, China, Tokyo, Japan, Singapore, and Mexico City, Mexico. To learn more about Park Systems, please visit http://www.parksystems.com.

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