Ideal for semiconductor and physics R&D applications, high push/pull and holding forces qualify this high-vacuum compatible drive as the fastest and strongest of its size class.
AUBURN, Mass., June 14, 2023 /PRNewswire-PRWeb/ -- Piezo motion and air bearing specialist PI (Physik Instrumente) introduces a new high force piezo linear motor actuator for ultra-high vacuum environments and applications in strong magnetic fields. The new N-331.24U PICMAWalk precision linear actuator is based on patented piezo actuator technology and a patented piezo stepping motion principle.
Features of the PICMAWalk V8 Piezo Linear Motors
- Suitable for vacuum up to 10-9 hPa
- 55mm travel
- 4nm sensor resolution
- Sub-nm actuator resolution
- 50N drive force
- 60N power-off holding force
- 10mm/sec max velocity
- Robust piezo V8 linear motor with PICMA® piezo stack elements for extreme durability
- Fastest and strongest piezo linear drive of its size class
- Precise, nanometer precision positioning of loads up to 5kg
- Plug-and-play, thanks to PI proprietary controller
Applications of the N-331 High Force UVH Piezo Linear Motor
- Precision motion drive in strong magnetic fields and in high vacuum
- Semiconductor test and manufacturing technology
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
- Physics related R&D
PI's PICMAWalk piezo linear motor utilizes a unique V-shaped arrangement of 8 (eight) PICMA® piezo actuators, resembling a classical V8 engine, to deliver exceptional push/pull and holding forces, combined with nanometer precision. These space-tested PICMA® actuators are known for their outstanding reliability, offering a push/pull force of 50N (11lbs) and power-off holding force of 60N (13lbs). The UHV-compatible linear motor can achieve a maximum velocity of 10mm/sec (0.4 inch/sec), and it can accurately position loads weighing up to 5kg (11lbs) with nanometer-level precision.
In contrast to classical electromagnetic actuators, piezo motor actuators offer the advantage of not creating magnetic fields as well as being unaffected by magnetic or electric fields. This characteristic makes them well-suited for a wide range of applications, from e-beam lithography to MRI technology. In industrial settings where precise positioning of optics, detectors, or cameras is required, it can be beneficial to eliminate power to the actuators once the fine positioning process is completed. With 60N of power-off position hold performance, the N-331 actuators with their self-clamping design provide a decisive advantage.
Watch the V8 Power Piezo Linear Motor Video
N-331 UHV-Linear Motor Specifications, Datasheets
PI Americas
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Media Contact
Vacuum compatible high-force piezo motor, PI (Physik Instrumente) LP, (508) 832-3456, [email protected]
SOURCE PI (Physik Instrumente) LP
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