Rigaku Features Latest Semiconductor Metrology Solutions at SEMICON West

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Rigaku presents its X-ray analytical instrumentation for the semiconductor industry at SEMICON West 2019

Rigaku TXRF-V310

Rigaku TXRF-V310 semiconductor metrology tool for ultra-trace analysis of elemental surface contamination

Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges.

Rigaku Corporation is pleased to announce its attendance at SEMICON West 2019. SEMICON West is the premier event for the microelectronics industry, highlighting the latest innovations, products, processes, and services for the design and manufacture of the most sophisticated electronics of today. The three-day event, organized by Semiconductor Equipment & Materials Institute, connects the entire extended electronics supply chain and takes place Tuesday, July 9 through Thursday, July 11, 2019 at the Moscone Center in San Francisco, California.

Rigaku, a leading supplier of X-ray metrology tools, is showcasing their semiconductor metrology products at booth 746.

Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 35 years of global market leadership in the semiconductor industry, Rigaku solutions employ X-ray fluorescence (XRF), diffraction (XRD), and reflectometry (XRR) techniques and enable everything from in-fab process control metrology to R&D for thin film and materials characterization, as well as total-reflection XRF spectrometers (TXRF) with integrated vapor phase decomposition (VPD) for trace contamination monitoring. The Rigaku vacuum products division offers a full line of rotary magnetic fluid feedthroughs.

The Rigaku Semiconductor Division designs and manufactures in-line, high-throughput X-ray monitoring systems for inspection and measurement to meet semiconductor manufacturing challenges, determining critical process parameters such as thin film thickness, composition, roughness, density, porosity, and crystal structure.

About Rigaku

Since its inception in Japan in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. Rigaku and its subsidiaries form a global group focused on general-purpose analytical instrumentation and the life sciences. With hundreds of major innovations to their credit, Rigaku companies are world leaders in X-ray spectrometry, diffraction, and optics, as well as small molecule and protein crystallography and semiconductor metrology. Today, Rigaku employs over 1,400 people in the manufacturing and support of its analytical equipment, which is used in more than 90 countries around the world supporting research, development, and quality assurance activities. Throughout the world, Rigaku continuously promotes partnerships, dialog, and innovation within the global scientific and industrial communities.

For further information, contact:
Michael Nelson
Rigaku Global Marketing Group
tel: +1. 512-225-1796
michael.nelson(at)rigaku.com

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Rigaku
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